| CMM |
Mitutoyo |
BEYOND CRYSTA C544 |
X : 500mm |
0.0001mm |
MPE.E=(1.9+3L/1000)/ (1.7+3L/1000)(µm) |
| Y : 400mm |
MPE.P=1.9/1.7(µm) |
| Z : 400mm |
– |
| CMM |
Acccretech (Tokyo Seimitsu) |
XYZAX AXCEL |
X : 900mm |
0.0002mm |
MPE E0 (µm) = 1.8 + 4L/1000 |
| Y : 1000mm |
(L in mm) |
| Z : 600mm |
– |
| Profile Projector |
Mitutoyo |
PV-500 |
X : 200mm |
0.001mm |
X,Y : (3 + L/10) µm |
| Y : 100mm |
| Surface Roughness Tester |
Mitutoyo |
SV-402 |
X-Axis : 50mm |
Z1 (Detector) : 0.1/0.01/0.001um |
NA |
| Z1 (Detector) : 600/80/8um |
| Roundtest |
Mitutoyo |
RA-2000 |
X : 175mm |
0.0001mm |
Radial – (0.02+6H/10000) μm [(0.8+0.6H) μinch], H= Probing height (mm [inch])
Axial – (0.02+6R/10000) μm [(0.8+0.6R) μinch], R= Probing radius (mm [inch]) |
| Y : 280mm |
| Tool Measuring Microscopes |
Mitutoyo |
MF-1020T |
X : 200mm |
0.001mm |
(µm) |
| Y : 100mm |
3+0.02L |
| Hardness Tester |
Mitutoyo |
HR-511 810-208E |
15, 30, 45, 60, 100, 150 kgf |
0.1RCK |
NA |
| 0.1SRCK |
| Hardness Tester |
Mitutoyo |
HM-113 810-969E |
10 ~ 1000 gf |
0.1HV |
NA |
| Contour Measuring Instrument |
Acccretech (Tokyo Seimitsu) |
Surfcom Nex 030 DX |
Z-axis (mm): 60mm |
0.1 µm |
X : ±(1.0 +1L/100) µm |
| Z : ±(1.5 + 2H/100) µm |
| Countourecord |
Acccretech (Tokyo Seimitsu) |
Surfcom 1700DX |
Z : 50mm |
0.1 µm |
X : ± (1.0+1L/100) |
| X : 100mm |
Z : ± (1.8+|2H|/100) |
| Roughness Tester |
Acccretech (Tokyo Seimitsu) |
Surfcom 1400D |
X : 100mm/0.1μm or 32,000 points |
0.001 |
±5 % |
| CNC Video Measuring System NEXIV |
Nikon |
iNEXIV VMA-6555 |
X : 650mm |
0.0001 |
X : ±0.40um |
| Y : 550mm |
Y : ±0.50um |
| Z : 200mm |
Z : ±1.0um |
| Profile Projector |
Nikon |
V-24B |
X : 200mm |
0.001 |
±0.05% for contour illumination
±0.075% for surface illumination |
| Y : 80mm |
| Profile Projector |
Nikon |
V-20B |
X : 150mm |
0.001 |
0.004 mm |
| Y : 100mm |
| Tool Measuring Microscopes |
Nikon |
MM-40 |
X : 120mm |
0.001mm |
0.007 mm |
| Y : 80mm |
| Multisensor Measurement System |
Keyence |
LM-X100L |
Z : 75mm |
Wide Field Mode : ±0.5µm;
High Accuracy Mode : ±0.1µm |
Wide Field Mode – Without binding: ±2µm With binding: ±(1.8 + 0.02L)µm;
High Accuracy Mode – Without binding: ±0.7µm With binding: ±(2.8 + 0.02L)µm |
| X : 325mm Y :175mm |
| JISC Loadcell |
JISC |
JLC-M1kN |
0-1000/0.1N |
1000 |
±0.50 % |
| Liquid Particle Spectrometer |
PMS |
CLS700(T)/Liquilazs05 (0.5 micron) |
0.5um ~ 20.0um |
NA |
Greater than 90% accuracy of 10,000 particles/ml |
| Smartscope |
OGP inc. |
250CFOX |
X : 300mm |
0.0001 |
X,Y : E2=(3.0+L/75)(µm) |
| Y : 150mm |
Z : E1=(5.0+L/150)(µm) |
| Z : 150mm |
– |
| Coating Thickness Gauge |
Fischer |
DUALSCOPE MP0 |
11.7 ~ 995.5 µm |
0.01 / 0.1 µm |
±0.3 µm |